Patent · US Active

Aqueous base-developable negative-tone films based on functionalized norbornene polymers

US8580477B2 · kind B2 · utility

3Cited by
6References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 21, 2009
Grant dateNov 12, 2013
Priority date
Expiry dateNov 9, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S430/106
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Embodiments in accordance with the present invention encompass negative-tone, aqueous base developable, self-imageable polymer compositions useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.