Aqueous base-developable negative-tone films based on functionalized norbornene polymers
US8580477B2 · kind B2 · utility
3Cited by
6References
11Claims
0Family size
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Inventors
Key dates
| Filing date | Sep 21, 2009 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Nov 9, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/106
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments in accordance with the present invention encompass negative-tone, aqueous base developable, self-imageable polymer compositions useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.