Pyroelectric detector and method for manufacturing same, pyroelectric detection device, and electronic instrument
US8581192B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2011 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Sep 16, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N15/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pyroelectric detector includes a pyroelectric detection element, a support member, a fixing part and a first reducing gas barrier layer. A first side of the support member faces a cavity and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface of the support member facing the opening part, and a part of a second surface of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.