Specimen holder with 3-axis movement for TEM 3D analysis
US8581207B2 · kind B2 · utility
2Cited by
8References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2010 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Jul 19, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a holder capable of a precise observation from 3 or more directions to analyze complicated internal structures of a specimen thereof, and more particularly, a specimen holder capable of a 3-axis movement for transmission electron microscope (TEM) 3D analysis that rotates cradles for supporting the specimen and moves the cradles back and forth and left and right, and freely changes directions of the specimen, thereby making it possible to more accurately analyze the specimen in three dimensions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.