Patent · US Active

Apparatus for producing plasma

US8581495B2 · kind B2 · utility

0Cited by

1References

10Claims

0Family size

Assignee

Reinhausen Plasma GmbH · DE

Inventors

Michael Bisges · Sinzing, DE
Thorsten Krüger · Munster, DE
Patrick Wichmann · Petershagen, DE
Hans-Jürgen Arning · Soest, DE

Key dates

Filing date	Jun 30, 2009
Grant date	Nov 12, 2013
Priority date	—
Expiry date	Aug 8, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH05H2245/36
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus for producing plasma, includes a container provided with at least one discharge electrode and a power supply unit that has at least one coupling electrode that can be capacitively coupled to the discharge electrode. The power supply unit is adapted to be removable from the container. The at least one coupling electrode is disposed beneath an insulating layer. In this way, the user can not come into direct contact with a coupling electrode after removing the power supply unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.