TFT-LCD array substrate, method and apparatus for detecting size or alignment deviation of multilayer patterns
US8582102B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2010 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Nov 12, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An embodiment provides a thin film transistor liquid crystal display (TFT-LCD) array substrate comprising a substrate and multilayer array patterns formed on the substrate, and a detecting mark, which is used to detect the size or alignment deviation of one array pattern among the multilayer array patterns and provided in a region of the substrate where the multilayer array patterns are not provided. The detecting mark comprises a detecting area and a detecting pattern which is provided in the same layer as the array pattern to be detected, the detecting pattern is located within the detecting area, and the detecting pattern has transmissivity or reflectivity different from that of the remaining area in the detecting area other than the detecting pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.