Systems and methods for calibrating an optical non-contact surface roughness measurement device
US8582117B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2011 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Dec 1, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A calibration apparatus for an optical non-contact surface roughness measurement device allowing for quick, accurate, and repeatable device calibration is described. In certain embodiments, the calibration apparatus may include a base, one or more calibration surfaces coupled to a top surface of the base, and an alignment collar coupled to the top surface of the base defining a window exposing the one or more calibration surfaces. By utilizing the mechanical structure of the alignment collar and base, the optical non-contact surface roughness measurement device may be accurately aligned with respect to the calibration surfaces, allowing for repeatable calibration measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.