Patent · US Active

Method of measuring an anisotropic surface diffusion tensor or surface energy anisotropies

US8583403B2 · kind B2 · utility

1Cited by
4References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 30, 2009
Grant dateNov 12, 2013
Priority date
Expiry dateJul 25, 2030

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B31/04
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method for the determination of the diffusion tensor anisotropy or the surface energy anisotropy that does not require the formation of particular structures, and that is capable of being performed in cases of moderate-amplitude perturbations. The invention relates to measuring the temporal evolution of natural or artificial roughnesses, and analyzing the results in the firm of the 2D power spectral density for moderate-amplitude perturbations typically characterized by amplitude/wavelength ratios of the perturbation for a spatially defined perturbation having two wavelengths along two orthogonal directions, the ratios typically being less than 0.3.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.