Physics-based signal processing algorithms for micromachined cantilever arrays
US8584506B2 · kind B2 · utility
0Cited by
3References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2006 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | May 11, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.