Nano-resonator inertial sensor assembly
US8584524B2 · kind B2 · utility
1Cited by
9References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 13, 2011 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Dec 13, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/097
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is a frequency modulated (FM) inertial sensing device and method which, in one embodiment, comprises an accelerometer having a proof mass coupled to a nano-resonator element. The nano-resonator element is oscillated at a first predetermined frequency, which may be a first resonant frequency, and is altered to oscillate at a second frequency, which may be a second resonant frequency, in response to a resultant force produced by the acceleration of the proof mass. The degree of change in nano-resonator element output frequency is sensed and processed using suitable processing circuitry as a change in acceleration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.