Micropores and methods of making and using thereof
US8585916B2 · kind B2 · utility
6Cited by
20References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2009 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Sep 2, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2× a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.