Process and structures for fabrication of solar cells with laser ablation steps to form contact holes
US8586403B2 · kind B2 · utility
18Cited by
14References
6Claims
0Family size
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Key dates
| Filing date | Feb 15, 2011 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Aug 24, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
Abstract
Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.