Patent · US Active

Miniature fourier transform spectrometer and method of operation

US8587787B2 · kind B2 · utility

4Cited by

11References

17Claims

0Family size

Assignee

Block Engineering, LLC · US

Inventors

David Reyes · Boston, US
E. Robert Schildkraut · Waltham, US
Jinhong Kim · Seoul, KR

Key dates

Filing date	Dec 28, 2007
Grant date	Nov 19, 2013
Priority date	—
Expiry date	Sep 30, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A Micro-Electro-Mechanical Systems (MEMS) interferometer is implemented in a Fourier transform spectrometer, which includes a common housing containing the interferometer and a gas cell, possibly including a preconcentrator. The interferometer system includes an optical bench and at least two mirror structures, being patterned from one or more layers on the optical bench and erected to extend substantially perpendicularly to the bench to define two interferometer arms to provide a MEMS interferometer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.