On-machine measurement method and measurement apparatus
US8589103B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 2010 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Mar 4, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/045
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A reference mirror 21 is disposed on a table 2, a first laser displacement sensor L1 for measuring a machined surface of a workpiece W and a second laser displacement sensor L2 for measuring a reference surface of the reference mirror 21 are disposed to a tool holder 3. A measurement motion applying section 24 causes the table 2 and the tool holder 3 to relatively move in a sinusoidal trajectory, and a sensitivity calculating section 28 calculates sensitivity of the first laser displacement sensor L1 based on machined-surface displacement data and reference-surface displacement data which are measured during the relative movement. Subsequently, an actual shape data calculating section 29 corrects the machined-surface displacement data based on the calculated sensitivity, and calculates actual shape data of the machined surface by taking the difference between the corrected machined-surface displacement data and the reference-surface displacement data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.