Method of fabricating a dual single-crystal backplate microphone
US8590136B2 · kind B2 · utility
17Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 27, 2010 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | Jul 9, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A dual backplate MEMS microphone system including a flexible diaphragm sandwiched between two single-crystal silicon backplates may be formed by fabricating each backplate in a separate wafer, and then transferring one backplate from its wafer to the other wafer, to form two separate capacitors with the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.