Optical guide with temperature sensing matrix
US8591105B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2006 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | Apr 28, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K17/003
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an optical element for guiding and forming a laser beam, and to a method for recording beam parameters, particularly in a laser system, comprising a carrier substrate (40) and a coating (39), which is applied to at least one side of the carrier substrate (40), and comprising at least one temperature sensor (38). The temperature sensor (38) is comprised of a number of pixels arranged in a matrix, and each respective pixel has at least one temperature-sensitive element (39). The at least one temperature-sensitive element (39) of the pixel is constructed inside the carrier substrate (40) made of silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.