Patent · US Active

Method and apparatus for DUV transmission mapping

US8592770B2 · kind B2 · utility

0Cited by

9References

12Claims

0Family size

Assignee

Carl Zeiss SMS Ltd. · IL

Inventors

Guy Ben-Zvi · Tamra, IL
Eitan Zait · Afula, IL
Vladimir Dmitriev · Moran, IL
Steven Labovitz · Sunnyvale, US
Erez Graitzer · Kiryat Shmona, IL
Ofir Sharoni · Pardes Hana-Karkur, IL

Key dates

Filing date	Jul 10, 2008
Grant date	Nov 26, 2013
Priority date	—
Expiry date	Jul 10, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/95676
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Apparatus and method for transmittance mapping of an object which is at least partially transparent to deep ultraviolet radiation. The method comprises directing a wide-band deep ultraviolet radiation so as to illuminate different areas of an array of successive areas of the object; using an optical detector positioned on an opposite side of the object with respect to the radiation source detecting the wide-band deep ultraviolet radiation that emerges from the object; and processing signals from the optical detector to determine the transmittance of the radiation through the different areas of the array of successive areas of the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.