Lithium extreme ultraviolet source and operating method
US8592788B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 25, 2013 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | Feb 25, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0035
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A plasma pinch extreme ultraviolet source using lithium vapor requires surrounding surfaces that are heated or cooled in order to evaporate the desired quantity of lithium, typically setting the vapor pressure of lithium at a pressure of a few torr. Two distinct surfaces within the whole set are designated as the electrodes that emit and receive the high current of the plasma pinch. A method is described whereby the temperature of these designated electrode surfaces is manipulated in order to condense lithium and provide a liquid metal protective layer to absorb both plasma and extreme ultraviolet heat thereby controlling electrode erosion. A further method is described that provides a protective flow of liquid lithium exactly on the axis of the pair of discharge electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.