Patent · US Active

Embedded MEMS sensors and related methods

US8592877B2 · kind B2 · utility

2Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 14, 2012
Grant dateNov 26, 2013
Priority date—
Expiry dateJun 14, 2032

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81C2203/0742
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Embodiments of embedded MEMS sensors and related methods are described herein. Other embodiments and related methods are also disclosed herein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.