Apparatus for producing a charged particle beam
US8593051B2 · kind B2 · utility
0Cited by
7References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2008 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | Feb 24, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/317
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus for the production of a charged particle beam, comprising: an ion source plasma chamber (104), having a door (106), and an accelerator (102) mounted on the face of the door remote from the ion source plasma chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.