Small size fast steering mirror having small size and excellent vibration characteristics
US8593712B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 1, 2010 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | Oct 14, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fast steering mirror has n plate springs (40a to 40d) and m drive means (50a to 50d). The plate springs (40a to 40d) are arranged such that a cross-sectional plane passing through the center of the thickness of each of the plate springs is on the same plane as the reflection surface of a mirror (20), and are arranged rotationally symmetric to each other about the center (O20). The plate springs each have a section extending along the circumference of the mirror holder, the section being obtained by dividing the perimeter of the mirror holder substantially into n sections. The drive means (50a to 50d) are arranged such that a cross-sectional plane passing through the center of torque generated by each of the drive means is on the same plane as the reflection surface of the mirror (20) and are rotationally symmetric to each other about the center (O20).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.