Method and system for evaluating a machine tool operating characteristics

US8594826B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Ehud Aharoni · Kfar Sava, IL
• Robert J. Baseman · Brewster, US
• Ramona Kei · Hopewell Junction, US
• Oded Margalit · Ramat Gan, IL
• Kevin J. Mackey · Wappingers Falls, US
• Michal Rosen-Zvi · Jerusalem, IL
• Raminderpal Singh · South Burlington, US
• Noam Slonim · Jerusalem, IL
• Hong Lin · Shanghai, CN
• Fateh A. Tipu · Beacon, US
• Adam Ticknor · Poughkeepsie, US
• Timothy M. McCormack · Pleasant Valley, US

Key dates

• Filing date: Sep 10, 2012
• Grant date: Nov 26, 2013
• Expiry date: Sep 10, 2032

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T409/309408
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.