High speed and fine substrate alignment apparatus in roll to roll system
US8596509B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2009 |
| Grant date | Dec 3, 2013 |
| Priority date | — |
| Expiry date | May 21, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65H2555/14
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Disclosed is a substrate alignment apparatus capable of performing coarse and fine alignments of a substrate in a progressing route to remove or reduce an alignment error between the substrate and a pattern roll. The coarse alignment may be performed by moving a frame using a stage when the alignment error is relatively large, and the fine alignment may be performed by moving subsidiary rollers of a roller unit relative to a main roller of a roller unit when the alignment error is relatively small. An example substrate alignment apparatus may include a frame and a roller unit rotatably fixed to the frame to support a substrate, wherein the roller unit includes a main roller, and at least one subsidiary roller fixed to the main roller such that the at least one subsidiary roller can move relative to the main roller to align the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.