Modular system and process for continuous deposition of a thin film layer on a substrate

US8597430B2 · kind B2 · utility

Assignee

• PrimeStar Solar, Inc. · US

Inventors

• Mark Jeffrey Pavol · Arvada, US
• Russell Weldon Black · Longmont, US
• Brian Murphy · Pfarrkirchen, DE
• Christopher Rathweg · Lafayette, US
• Edwin Jackson Little · Denver, US
• Max William Reed · Niwot, US

Key dates

• Filing date: Jul 27, 2012
• Grant date: Dec 3, 2013
• Expiry date: Jul 27, 2032

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/568
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A system for vapor deposition of a thin film layer on a photovoltaic module substrate is provided. The system includes a vacuum chamber having a pre-heat section, a vapor deposition apparatus, and a cool-down section; and a conveyor system operably disposed within said vacuum chamber and configured for conveying the substrates in a serial arrangement from said pre-heat section and through said vapor deposition apparatus at a controlled constant linear speed. The vapor deposition apparatus is configured for depositing a thin film of a sublimed source material onto an upper surface of the substrates as the substrates are continuously conveyed by said conveyor system through said vapor deposition apparatus.