Infrared detector based on suspended bolometric micro-plates
US8598528B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2011 |
| Grant date | Dec 3, 2013 |
| Priority date | — |
| Expiry date | Jun 19, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0853
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared wavelengths includes a substrate; an array of bolometric micro-plates for detecting the radiation suspended above the substrate by support arms; and metallic reflectors formed on the substrate underneath the micro-plates to reflect that portion of the radiation which has passed through said micro-plates without being absorbed by the latter. For each micro-plate, a corresponding reflector includes a first part located underneath the micro-plate which extends as a second part not positioned underneath the micro-plate. At least the second part has surface texturing in a repeating pattern for coupling a portion of incident radiation on the second part to a guided wave that propagates towards the first part of the reflector positioned underneath micro-plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.