Patent · US Active

Carbon nanotube-based interconnection element

US8598708B2 · kind B2 · utility

1Cited by

18References

21Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Jean Dijon · Le Pont-de-Claix, FR
Philippe Pantigny · Le Pont-de-Claix, FR

Key dates

Filing date	Dec 20, 2007
Grant date	Dec 3, 2013
Priority date	—
Expiry date	Feb 23, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An element to interconnect at least two conductors of a microelectronic circuit is disclosed that includes an initial conductor, referred to as lower conductor; a dielectric layer situated on the initial conductor; a second conductor, referred to as upper conductor, on the dielectric layer; a cavity in the dielectric layer emerging, on the one hand, on the lower conductor and, on the other hand, on the upper conductor. The upper conductor forms a bridge above the lower conductor and the cavity forms, at a level where it emerges on the upper conductor, two vents on both sides of the latter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.