Patent · US Active

Micromirror device and micromirror array

US8599460B2 · kind B2 · utility

0Cited by

2References

39Claims

0Family size

Assignee

NIPPON TELEGRAPH AND TELEPHONE CORPORATION · JP

Inventors

Mitsuo Usui · Yokohama, JP
Shingo Uchiyama · Sagamihara, JP
Fusao Shimokawa · Yokohama, JP
Etsu Hashimoto · Yokohama, JP
Johji Yamaguchi · Yokohama, JP
Tohru Matsuura · Yokohama, JP
Toshifumi Konishi · Machida, JP

Key dates

Filing date	Apr 15, 2008
Grant date	Dec 3, 2013
Priority date	—
Expiry date	Jun 28, 2029

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/042
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A movable beam (182a) and a movable beam (182b) each having one end fixed to a frame portion (181) of a mirror substrate (108) are provided inside the frame portion (181). The movable beam (182a) and the movable beam (182b) each having one end fixed to a corresponding to one of two opposite inner sides of the frame portion (181) are aligned at a predetermined distance on the same line in the direction in which the two sides face each other. Each of the movable beam (182a) and the movable beam (182b) has the other end displaceable in the normal line direction of the mirror substrate (108) and therefore has a cantilever structure. A mirror (183) is arranged between the movable beam (182a) and the movable beam (182b) and connected to them via a pair of connectors (109a, 109b).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.