MEMS anchors
US8599463B2 · kind B2 · utility
17Cited by
414References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2012 |
| Grant date | Dec 3, 2013 |
| Priority date | — |
| Expiry date | Apr 18, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0307
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.