Method for forming a MEMS capacitor array

US8601658B2 · kind B2 · utility

Assignee

• Massachusetts Institute of Technology · US

Inventors

• Vladimir Bulovic · Lexington, US
• Corinne E. Packard · Lakewood, US
• Jennifer Yu · Palo Alto, US
• Apoorva Murarka · Cambridge, US
• LeeAnn Kim · Dover, US

Key dates

• Filing date: Sep 29, 2011
• Grant date: Dec 10, 2013
• Expiry date: Sep 29, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T156/1168
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.