Patent · US Active

Piezoelectric ALN RF MEM switches monolithically integrated with ALN contour-mode resonators

US8604670B2 · kind B2 · utility

28Cited by

9References

26Claims

0Family size

Assignee

The Trustees of the University of Pennsylvania · US

Inventors

Rashed Mahameed · Beaverton, US
Nipun Sinha · Philadelphia, US
Gianluca Piazza · Lodi, IT

Key dates

Filing date	Jun 1, 2009
Grant date	Dec 10, 2013
Priority date	—
Expiry date	Feb 1, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Piezoelectric switches and methods of forming piezoelectric switches. The piezoelectric switch includes first and second cantilever beam actuators. The second cantilever beam actuator has a projection that overlaps the first cantilever beam actuator in a contact region. The projection is mechanically separated from the first cantilever beam actuator by a nanogap such that the first and second cantilever beam actuators are electrically isolated from each other. Each of the first and second cantilever beam actuators includes a piezoelectric actuation layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.