Plasma excitation module
US8604696B2 · kind B2 · utility
0Cited by
10References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2009 |
| Grant date | Dec 10, 2013 |
| Priority date | — |
| Expiry date | Mar 10, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3325
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma excitation module including a chamber, a plurality of coils and a multi-duct gas intake system is provided. The chamber has a dielectric layer. The coils are disposed at an outer side of the dielectric layer, and the coils are separated from each other by an interval and in parallel connection. The multi-duct gas intake system surrounds the dielectric layer and is communicated with the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.