Tester and test apparatus including the same
US8604814B2 · kind B2 · utility
1Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 21, 2011 |
| Grant date | Dec 10, 2013 |
| Priority date | — |
| Expiry date | Jun 12, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2889
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tester may include a test head with a movable coupler, a probe card with a connector unit that is coupled with the coupler, and a needle block disposed on the probe card. In one example, the tester may test respective subsets of semiconductor devices on a wafer via a one-touch operation by moving a coupler on the test head, while the wafer remains in continuous and uninterrupted electrical contact with the tester during testing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.