Patent · US Active

Micromechanical sensor

US8607632B2 · kind B2 · utility

2Cited by

3References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Daniel Christoph Meisel · Pittsburgh, US
Joerg Hauer · Reutlingen, DE

Key dates

Filing date	Aug 3, 2009
Grant date	Dec 17, 2013
Priority date	—
Expiry date	May 2, 2030

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0235
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical sensor having at least one movably mounted measuring element which is opposite at least one stationary electrode, the electrode being situated in a first plane, and being contacted by at least one printed conductor track which is situated in a second plane. A third plane is located between the first plane and the second plane, the third plane including an electrically conductive material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.