Silicon production with a fluidized bed reactor integrated into a Siemens-type process
US8609058B2 · kind B2 · utility
1Cited by
21References
26Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 21, 2011 |
| Grant date | Dec 17, 2013 |
| Priority date | — |
| Expiry date | Oct 8, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/129
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.