Solution containment during buffer layer deposition
US8609182B2 · kind B2 · utility
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18References
10Claims
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Key dates
| Filing date | Mar 4, 2009 |
| Grant date | Dec 17, 2013 |
| Priority date | — |
| Expiry date | Dec 24, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/541
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Improved methods and apparatus for forming thin-film layers of chalcogenide on a substrate web. Solutions containing the reactants for the chalcogenide layer may be contained substantially to the front surface of the web, controlling the boundaries of the reaction and avoiding undesired deposition of chalcogenide upon the back side of the web.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.