Patent · US Active

Solution containment during buffer layer deposition

US8609182B2 · kind B2 · utility

0Cited by
18References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 4, 2009
Grant dateDec 17, 2013
Priority date
Expiry dateDec 24, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/541
  • WIPO fieldHandling
  • WIPO sectorMechanical engineering

Abstract

Improved methods and apparatus for forming thin-film layers of chalcogenide on a substrate web. Solutions containing the reactants for the chalcogenide layer may be contained substantially to the front surface of the web, controlling the boundaries of the reaction and avoiding undesired deposition of chalcogenide upon the back side of the web.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.