Pixel-level optical elements for uncooled infrared detector devices
US8610070B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2010 |
| Grant date | Dec 17, 2013 |
| Priority date | — |
| Expiry date | Jun 6, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/0488
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Pixel-level monolithic optical element configurations for uncooled infrared detectors and focal plane arrays in which a monolithically integrated or fabricated optical element may be suspended over a microbolometer pixel membrane structure of an uncooled infrared detector element A monolithic optical element may be, for example, a polarizing or spectral filter element, an optically active filter element, or a microlens element that is structurally attached by an insulating interconnect to the existing metal interconnects such that the installation of the optical element substantially does not impact the thermal mass or thermal time constant of the microbolometer pixel structure, and such that it requires little if any additional device real estate area beyond the area originally consumed by the microbolometer pixel structure interconnects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.