Patent · US Active

Embedded microelectromechanical systems sensor and related devices and methods

US8610223B2 · kind B2 · utility

0Cited by
3References
23Claims
0Family size

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Key dates

Filing dateJul 27, 2011
Grant dateDec 17, 2013
Priority date—
Expiry dateJul 27, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06F3/0443
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

Embodiments of embedded MEMS sensors and related methods are described herein. Other embodiments and related methods are also disclosed herein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.