MEMS element and electrical device using the same
US8610224B2 · kind B2 · utility
6Cited by
7References
8Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 21, 2012 |
| Grant date | Dec 17, 2013 |
| Priority date | — |
| Expiry date | Aug 21, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00293
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In a MEMS element 500 where a MEMS structure 201 is hermetically sealed in a cavity 110 by a substrate 301 and laminated structure 120, interface sealing layers 101, 102 and 103 are provided between two layers that constitute the laminated structure 120, so as to prevent gas from breaking into the cavity 110 through the interface between two layers along the direction parallel to the surface of the substrate 301.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.