Electrostatically actuated micro-mechanical switching device

US8610520B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• SONY GROUP CORPORATION · JP

Inventors

• Joerg Froemel · Sendai, JP
• Thomas Gessner · Plymouth, US
• Christian Kaufmann · Sindelfingen, DE
• Stefan Leidich · Rutesheim, DE
• Markus Nowack · Pockau, DE
• Steffen Kurth · Bitterfeld-Wolfen, DE
• Andreas Bertz · Thalheim/Erzgebirge, DE
• Koichi Ikeda
• Akira Akiba · Yokohama, JP

Key dates

• Filing date: Jun 7, 2011
• Grant date: Dec 17, 2013
• Expiry date: May 8, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01H2001/0078
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line,…