Apparatus for preventing stiction of MEMS microstructure
US8613287B2 · kind B2 · utility
1Cited by
4References
9Claims
0Family size
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Key dates
| Filing date | Apr 14, 2008 |
| Grant date | Dec 24, 2013 |
| Priority date | — |
| Expiry date | Nov 22, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/115
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.