Method and system of fabricating PZT nanoparticle ink based piezoelectric sensor
US8614724B2 · kind B2 · utility
3Cited by
1References
20Claims
0Family size
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Key dates
| Filing date | Aug 17, 2011 |
| Grant date | Dec 24, 2013 |
| Priority date | — |
| Expiry date | Sep 28, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M5/0033
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure provides in one embodiment a method of fabricating a lead zirconate titanate (PZT) nanoparticle ink based piezoelectric sensor. The method has a step of formulating a lead zirconate titanate (PZT) nanoparticle ink. The method further has a step of depositing the PZT nanoparticle ink onto a substrate via an ink deposition process to form a PZT nanoparticle ink based piezoelectric sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.