Force sensor with reduced noise

US8616059B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Arnaud Walther · Grenoble, FR
• Guillaume Jourdan · Grenoble, FR
• Philippe Robert · Grenoble, FR

Key dates

• Filing date: Mar 11, 2011
• Grant date: Dec 31, 2013
• Expiry date: Nov 30, 2031

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/051
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A MEMS or NEMS device for detecting a force following a given direction, comprising a support and at least one seismic mass capable of moving under the effect of the force to be measured in the direction of the force, and a detector for detecting the movement of the seismic mass, the seismic mass being articulated relative to the support by at least one pivot link, and an actuator capable of varying the distance between the axis of the pivot link and the center of gravity of the exertion of the force on the seismic mass.