Electrode assembly for the removal of surface oxides by electron attachment

US8617352B2 · kind B2 · utility

Assignees

• AIR PRODUCTS AND CHEMICALS, INC. · US
• BTU International, Inc. · US

Inventors

• Chun Christine Dong · Macungie, US
• Wayne Thomas McDermott · Fogelsville, US
• Alexander Schwarz · Soest, DE
• Gregory Khosrov Arslanian · Pipersville, US
• Richard E. Patrick · Tamaqua, US
• Gary Orbeck · Windham, US
• Donald A. Seccombe, Jr. · Cheshire, US

Key dates

• Filing date: Dec 15, 2010
• Grant date: Dec 31, 2013
• Expiry date: Dec 15, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.