Synthesis of aligned carbon nanotubes on double-sided metallic substrate by chemical vapor depositon

US8617650B2 · kind B2 · utility

Assignee

• The Hong Kong University of Science and Technology

Inventors

• Huan-Wen Wang · Baoshan, TW
• Ka Ming Ng · Hong Kong, CN
• Xijun Hu · Beijing, CN
• Jiyun Feng · Hong Kong, CN

Key dates

• Filing date: Sep 28, 2007
• Grant date: Dec 31, 2013
• Expiry date: Dec 8, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Aligned multi-walled carbon nanotubes were grown on both sides of a metallic or metal-coated substrate by water vapor-assisted chemical vapor deposition. Aligned carbon nanotube films of thickness ranging from 1 μm to over 100 μm were obtained. By manipulating various operating factors—position of substrate in the reactor, amount of water vapor, amount of catalyst, reactor temperature, and growth time, the morphology and thickness of these carbon nanotube films could be adjusted.