Vertically oriented nanostructure and fabricating method thereof
US8617967B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 3, 2010 |
| Grant date | Dec 31, 2013 |
| Priority date | — |
| Expiry date | Sep 22, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02645
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A vertically oriented nanometer-wires structure is disclosed. The vertically oriented nanometer-wires structure includes a non-crystalline base and many straight nanometer-wires. The straight nanometer-wires are uniformly distributed on the non-crystalline base, and the angle between each of the straight nanometer-wire and the non-crystalline base is 80-90 degrees. The straight nanometer-wires structure can be widely applied in semiconductor, optoelectronic, biological and energy field. What is worth to be noticed is that the non-crystalline base can be glass, ceramics, synthetic, resin, rubber or even metal foil, and the straight nanometer-wires and the non-crystalline base are still orthogonal to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.