Patent · US Active

Trench Schottky rectifier device and method for manufacturing the same

US8618626B2 · kind B2 · utility

2Cited by
10References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 12, 2010
Grant dateDec 31, 2013
Priority date
Expiry dateAug 3, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/111
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A trench Schottky rectifier device includes a substrate having a first conductivity type, a plurality of trenches formed in the substrate, and an insulating layer formed on sidewalls of the trenches. The trenches are filled with conductive structure. There is an electrode overlying the conductive structure and the substrate, and thus a Schottky contact forms between the electrode and the substrate. A plurality of embedded doped regions having a second conductivity type are formed in the substrate and located under the trenches. Each doped region and the substrate form a PN junction to pinch off current flowing toward the Schottky contact so as to suppress current leakage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.