Patent · US Active

Measuring device with a micro-electromechanical capacitive sensor

US8618816B2 · kind B2 · utility

3Cited by

2References

18Claims

0Family size

Assignee

Albert-Ludwigs-Universitaet Freiburg · DE

Inventors

Lin He · Irvine, US
Yiannos Manoli · Glückstadt, DE
Alexander Buhmann · Reutlingen, DE
Armin Taschwer · Ammerschwihr, FR
Thomas Northemann · Gerlingen, DE

Key dates

Filing date	Jul 6, 2009
Grant date	Dec 31, 2013
Priority date	—
Expiry date	Sep 7, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5726
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.