Device for detecting the thinning down of the substrate of an integrated circuit chip
US8618821B2 · kind B2 · utility
6Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2010 |
| Grant date | Dec 31, 2013 |
| Priority date | — |
| Expiry date | Mar 30, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for detecting the thinning down of the substrate of an integrated circuit chip, including, in the active area of the substrate, bar-shaped diffused resistors connected as a Wheatstone bridge, wherein: first opposite resistors of the bridge are oriented along a first direction; the second opposite resistors of the bridge are oriented along a second direction; and the first and second directions are such that a thinning down of the substrate causes a variation of the imbalance value of the bridge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.