MEMS based Kelvin probe for material state characterization
US8618824B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 24, 2008 |
| Grant date | Dec 31, 2013 |
| Priority date | — |
| Expiry date | Dec 16, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device and method for monitoring the material health of a structure, providing a miniaturized MEMS Kelvin probe within a housing, wherein the Kelvin probe comprises a conductive plate formed of a stable metal and positioned substantially parallel to the structure; a piezoelectric vibrator for vibrating the conductive plate; and an electrical circuit connected to the conductive plate and the structure, wherein the conductive plate and the structure form a capacitor. The device is contained in one small, lightweight package that can be placed at one or more locations of interest. The sensor can be left in-place for continuous monitoring or for active testing at desired intervals, or be brought to the aircraft at desired intervals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.