Apparatus and method for recovery of sulfur hexafluoride
US8623120B2 · kind B2 · utility
1Cited by
9References
17Claims
0Family size
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Key dates
| Filing date | Oct 28, 2011 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Jul 10, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and a method for recovery of sulfur hexafluoride is provided. Sulfur hexafluoride (SF6) may be separated with high-concentration and improved recovery ratio through a multi-stage separation and recovery processes using a plurality of separation membrane modules, and as well, SF6 gas may be concentrated to maximize the SF6 recovery ratio before the separation and recovery processes through the separation membrane modules. Furthermore, sulfur dioxide (SO2) and moisture included in the SF6 waste gas may be removed effectively so as to extend the service life of the separation membrane modules.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.