MEMS-based micro and nano grippers with two axis force sensors
US8623222B2 · kind B2 · utility
1Cited by
1References
10Claims
0Family size
Inventors
Key dates
| Filing date | Oct 16, 2012 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Oct 16, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/033
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.